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OUR RESEARCH

OUR RESEARCH

An extreme change in structural and optical properties of indium oxynitride deposited by reactive gas-timing RF magnetro

Post on 2009-06-14

 

 

The indium oxynitride (InON) films were achieved by reactive RF magnetron sputtering indium target which has the purity of 99.999% with a novel reactive gas-timing technique. The s...

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