จักรพงศ์ ศุภเดช
ผู้ช่วยนักวิจัย
E-mail : jakrapong.supadech@nectec.or.th
Telephone : +66 38 857-100 ext. 131
Roles and Responsibilities
Plasma etch process engineer
Research Interests
ตัวตรวจวัดอุณหภูมิ, เครื่องจักรกลขนาดจุลภาค, เทคนิคการกัดด้วยพลาสมา
Selected Publications
N. Atthi, K. Tantanasiriwong, A. Pankiew, W. Bunjongpru, J. Supadech, A. Srisuwan, N. Penpondee, C.Hruanun and A. Poyai, “The Microstructure Pattern Quality Investigation After Patterning and Etching Steps by Using SEM and EDX Characterization Techniques”, the 26th Annual Conference of The microscopy society of Thailand, (MST-2009), pp.139-140, THAILAND, (2009).
N. Atthi, O. Nimittrakoolchai, S. Supothina, J. Supadech, W. Jeamsaksiri, A. Pankiew, C. Hruanun, and A. Poyai, “Effect of Si micro-pattern shape on water-repellant surface properties”, The 4th International Conference on Sensors (ASIA sense 2009), THAILAND, (2009).
N. Atthi, N. Chathirat, S. Dangtip, O. Trithaveesak, J. Supadech, W. Jeamsaksiri, A. Pankiew, C. Hruanun, and A. Poyai, “Fabrication of transducer on opaque substrate by using ultra-thin transparent membrane for biosensor application”, The 4th International Conference on Sensors (ASIA sense 2009), THAILAND, (2009).
N. Atthi, J. Supadech, A Srisuwan, O.Trithaveesak, A. Pankiew, W. Jeamsaksiri, A. Pankiew, C. Hruanun, and A. Poyai, “The effects of photoresist pattern shape to deep-etched pattern quality”, The 4th International Conference on Sensors (ASIA sense 2009), THAILAND, (2009).
Post on 2009-06-11 | View 16208
OUR RESEARCH
Improving Sensitivity of p-n Junction Temperature Sensor by Carrier Lifetime Modification
This paper presents the relation between the staring cobalt thickness with carriergeneration lifetime, which effects to the sensitivity of p-n junction temperature sensor. The star...
