
KNOWLEDGE CENTER
With all Bodies of Knowledge to answer all questions Micro-Electronics Center
We not only concentrate on developing Thai micro-electronics personnel to meet international standards and creating new personnel for Thai micro-electronics industry but also emphasize on developing all knowledge concerning micro-electronics which will pave the foundation and give the understanding so that business operators or anybody interested in this field can apply all the knowledge to their daily works.
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OUR RESEARCH

High-dielectric constant AlON prepared by RF gas-timing sputtering for high capacitance density
This paper presents the method to prepare and characterize high-dielectric constant aluminum oxynitride (AlON) formed by RF gas-timing sputtering. AlON layers of 725nm have been pr...



