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We concentrate on not only the research and development on micro-electronics technology to pursue excellence of services and products, but also on the development of Thai personnel for the sake of proficiency and global standards. We have opened our center for everybody that is interested in micro-electronics technology and innovation. We also provide training course by our experts of micro-electronics technology to outside organizations.



 

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OUR RESEARCH

OUR RESEARCH

High-dielectric constant AlON prepared by RF gas-timing sputtering for high capacitance density

Post on 2009-06-14

 

 

This paper presents the method to prepare and characterize high-dielectric constant aluminum oxynitride (AlON) formed by RF gas-timing sputtering. AlON layers of 725nm have been pr...

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