OUR RESEARCH
Realizing that we are an important force that drives Thai industry to the international level, we select just excellent services and products to meet all kinds of needs for micro-electronics matters for your businesses. With the completeness of instruments and tools, professional and efficient personnel, and the production processes that we care for in every detail-even the waste treatment system; you can be certain that your businesses can leap to the international level without jeopardizing the environment.
OUR RESEARCH
High-dielectric constant AlON prepared by RF gas-timing sputtering for high capacitance density
This paper presents the method to prepare and characterize high-dielectric constant aluminum oxynitride (AlON) formed by RF gas-timing sputtering. AlON layers of 725nm have been pr...