RESEARCHER

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จักรพงศ์ ศุภเดช

ผู้ช่วยนักวิจัย

 
 

arrow E-mail : jakrapong.supadech@nectec.or.th

arrow Telephone : +66 38 857-100 ext. 131

 

Roles and Responsibilities

Plasma etch process engineer

 

Research Interests

ตัวตรวจวัดอุณหภูมิ, เครื่องจักรกลขนาดจุลภาค, เทคนิคการกัดด้วยพลาสมา

 

Selected Publications

N. Atthi, K. Tantanasiriwong, A. Pankiew, W. Bunjongpru, J. Supadech, A. Srisuwan, N. Penpondee, C.Hruanun and A. Poyai, “The Microstructure Pattern Quality Investigation After Patterning and Etching Steps by Using SEM and EDX Characterization Techniques”, the 26th Annual Conference of The microscopy society of Thailand, (MST-2009), pp.139-140, THAILAND, (2009).

N. Atthi, O. Nimittrakoolchai, S. Supothina, J. Supadech, W. Jeamsaksiri, A. Pankiew, C. Hruanun, and A. Poyai, “Effect of Si micro-pattern shape on water-repellant surface properties”, The 4th International Conference on Sensors (ASIA sense 2009), THAILAND, (2009).

N. Atthi, N. Chathirat, S. Dangtip, O. Trithaveesak, J. Supadech, W. Jeamsaksiri, A. Pankiew, C. Hruanun, and A. Poyai, “Fabrication of transducer on opaque substrate by using ultra-thin transparent membrane for biosensor application”, The 4th International Conference on Sensors (ASIA sense 2009), THAILAND, (2009).

N. Atthi, J. Supadech, A Srisuwan, O.Trithaveesak, A. Pankiew, W. Jeamsaksiri, A. Pankiew, C. Hruanun, and A. Poyai, “The effects of photoresist pattern shape to deep-etched pattern quality”, The 4th International Conference on Sensors (ASIA sense 2009), THAILAND, (2009).

 

Post on 2009-06-11 | View 17731

OUR RESEARCH

OUR RESEARCH

Extraction of Defect in Doping Silicon Wafer by Analyzing the Lifetime Profile Method

Post on 2009-06-14

 

 

The total leakage current in silicon p-n junction diodes compatible with 0.8 μm CMOS technology is investigated. The generation lifetime is a key parameter for the leakage curre...

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