Dr. Opas Trithaveesak
Senior Researcher
E-mail : opas.trithaveesakl@nectec.or.th
Telephone : +66 38 857-100 ext. 121
Roles and Responsibilities
Semiconductor Device Fabrication and Characterization
Research Interests
Semiconductor Sensors Fabrication, Characterization, and Applications
Selected Publications
Bunjongpru, W., Porntheeraphat, S., Trithaveesak, O., Somwang, N., Khomdet, P., Jeamsaksiri, W., et al. The innovative AlN-ISFET based pH sensor. 5th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, ECTI-CON 2008 2, art. no. 4600559, pp. 833-836
Schubert, J., Trithaveesak, O., Zander, W., Roeckerath, M., Heeg, T., Chen, H. Y., et al. Characterization of epitaxial lanthanum lutetium oxide thin films prepared by pulsed-laser deposition. Applied Physics A: Materials Science and Processing 2008, 90(3), 577-579
Trithaveesak, O., Schubert, J., & Buchal, C. Ferroelectric properties of epitaxial BaTiO3 thin films and heterostructures on different substrates. Journal of Applied Physics 2005, 98(11), 1-7.
Post on 2009-06-11 | View 19319
OUR RESEARCH
High-dielectric constant AlON prepared by RF gas-timing sputtering for high capacitance density
This paper presents the method to prepare and characterize high-dielectric constant aluminum oxynitride (AlON) formed by RF gas-timing sputtering. AlON layers of 725nm have been pr...
